Effect of stress on fluorite-structured ferroelectric thin films for semiconductor devices
出版年份 2023 全文链接
标题
Effect of stress on fluorite-structured ferroelectric thin films for semiconductor devices
作者
关键词
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出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 160, Issue -, Pages 107411
出版商
Elsevier BV
发表日期
2023-03-10
DOI
10.1016/j.mssp.2023.107411
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