Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface

标题
Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 127, Issue 6, Pages 064105
出版商
AIP Publishing
发表日期
2020-02-11
DOI
10.1063/1.5128502

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