Regulating ferroelectricity in Hf0.5Zr0.5O2 thin films: Exploring the combined impact of oxygen vacancy and electrode stresses
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Title
Regulating ferroelectricity in Hf0.5Zr0.5O2 thin films: Exploring the combined impact of oxygen vacancy and electrode stresses
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 134, Issue 17, Pages -
Publisher
AIP Publishing
Online
2023-11-03
DOI
10.1063/5.0170657
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