Characterization of Ferroelectric Characteristics for Hafnium Zirconium Oxide Capacitors with Refractory Electrodes
出版年份 2022 全文链接
标题
Characterization of Ferroelectric Characteristics for Hafnium Zirconium Oxide Capacitors with Refractory Electrodes
作者
关键词
-
出版物
ECS Journal of Solid State Science and Technology
Volume 11, Issue 5, Pages 053012
出版商
The Electrochemical Society
发表日期
2022-05-13
DOI
10.1149/2162-8777/ac6f1c
参考文献
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