Effect of O2/Ar gas flow ratio on the optical properties and mechanical stress of sputtered HfO2 thin films

出版年份 2015 全文链接

标题

作者

关键词

HfO, 2, thin film, Sputtering, Optical properties, Residual stress

出版物

Volume 592, Issue -, Pages 135-142

出版商

Elsevier BV

发表日期

2015-09-13

DOI

10.1016/j.tsf.2015.08.062

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