标题
Stabilization of the ferroelectric phase in Hf-based oxides by oxygen scavenging
作者
关键词
-
出版物
Applied Physics Express
Volume 14, Issue 12, Pages 126503
出版商
IOP Publishing
发表日期
2021-11-17
DOI
10.35848/1882-0786/ac3a3f
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO2 films
- (2021) Lutz Baumgarten et al. APPLIED PHYSICS LETTERS
- The effects of proton radiation on aluminum oxide/zirconium-doped hafnium oxide stacked ferroelectric tunneling junctions
- (2021) Xueqin Yang et al. Applied Physics Express
- Atomic Layer Deposition Plasma-Based Undoped-HfO2 Ferroelectric FETs for Non-Volatile Memory
- (2021) Jun-Dao Luo et al. IEEE ELECTRON DEVICE LETTERS
- High Speed and Large Memory Window Ferroelectric HfZrO₂ FinFET for High-Density Nonvolatile Memory
- (2021) Siao-Cheng Yan et al. IEEE ELECTRON DEVICE LETTERS
- Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface
- (2020) W. Hamouda et al. JOURNAL OF APPLIED PHYSICS
- Enhanced ferroelectricity in ultrathin films grown directly on silicon
- (2020) Suraj S. Cheema et al. NATURE
- Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors
- (2020) W. Hamouda et al. APPLIED PHYSICS LETTERS
- High-k HfxZr1-xO₂ Ferroelectric Insulator by Utilizing High Pressure Anneal
- (2020) Dipjyoti Das et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Enhanced soft magnetic properties in CoZrTa(B) thin film with improving amorphous structure via introducing B atoms
- (2020) Xiulan Xu et al. AIP Advances
- Composition-Dependent Ferroelectric Properties in Sputtered HfXZr1−XO2 Thin Films
- (2019) Qing Luo et al. IEEE ELECTRON DEVICE LETTERS
- Recent progress for obtaining the ferroelectric phase in hafnium oxide based films: impact of oxygen and zirconium
- (2019) Uwe Schroeder et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Improved Ferroelectric Switching Endurance of La-Doped Hf0.5Zr0.5O2 Thin Films
- (2018) Anna G. Chernikova et al. ACS Applied Materials & Interfaces
- Polarization switching behavior of Hf–Zr–O ferroelectric ultrathin films studied through coercive field characteristics
- (2018) Shinji Migita et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Review and perspective on ferroelectric HfO2-based thin films for memory applications
- (2018) Min Hyuk Park et al. MRS Communications
- Re-distribution of oxygen at the interface between γ-Al2O3 and TiN
- (2017) E. O. Filatova et al. Scientific Reports
- Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface
- (2016) Roy Winter et al. ACS Applied Materials & Interfaces
- Reversible oxygen scavenging at room temperature using electrochemically reduced titanium oxide nanotubes
- (2015) Thomas Close et al. Nature Nanotechnology
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ultimate Scaling of High-κ Gate Dielectrics: Higher-κ or Interfacial Layer Scavenging?
- (2012) Takashi Ando Materials
- Physical origins of mobility degradation in extremely scaled SiO2/HfO2 gate stacks with La and Al induced dipoles
- (2010) Takashi Ando et al. APPLIED PHYSICS LETTERS
Discover Peeref hubs
Discuss science. Find collaborators. Network.
Join a conversationCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now