Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO2 films
出版年份 2021 全文链接
标题
Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO2 films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 118, Issue 3, Pages 032903
出版商
AIP Publishing
发表日期
2021-01-19
DOI
10.1063/5.0035686
参考文献
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