Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes

标题
Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 11, Pages 112914
出版商
AIP Publishing
发表日期
2013-03-23
DOI
10.1063/1.4798265

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