Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode

标题
Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode
作者
关键词
Hf, 0.5, Zr, 0.5, O, 2, films, Ferroelectric polarization, Endurance properties, Thermal expansion coefficient, W electrode
出版物
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 104, Issue -, Pages 1-7
出版商
Elsevier BV
发表日期
2021-09-09
DOI
10.1016/j.jmst.2021.07.016

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