Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf 0.5 Zr 0.5 )O 2 thin films deposited on various substrates

出版年份 2017 全文链接

标题

作者

关键词

(Hf, 0.5, Zr, 0.5, )O, 2, thin films, Ferroelectric property, Film thickness dependence

出版物

Volume 70, Issue -, Pages 239-245

出版商

Elsevier BV

发表日期

2016-12-24

DOI

10.1016/j.mssp.2016.12.008

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