Oxygen vacancy concentration as a function of cycling and polarization state in TiN/Hf0.5Zr0.5O2/TiN ferroelectric capacitors studied by x-ray photoemission electron microscopy
出版年份 2022 全文链接
标题
Oxygen vacancy concentration as a function of cycling and polarization state in TiN/Hf0.5Zr0.5O2/TiN ferroelectric capacitors studied by x-ray photoemission electron microscopy
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 120, Issue 20, Pages 202902
出版商
AIP Publishing
发表日期
2022-05-17
DOI
10.1063/5.0093125
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