The Influence of Top and Bottom Metal Electrodes on Ferroelectricity of Hafnia

标题
The Influence of Top and Bottom Metal Electrodes on Ferroelectricity of Hafnia
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 68, Issue 2, Pages 523-528
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2021-01-22
DOI
10.1109/ted.2020.3046173

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