Atomic layer deposition of B-doped ZnO using triisopropyl borate as the boron precursor and comparison with Al-doped ZnO

Selective Area Spatial Atomic Layer Deposition of ZnO, Al2O3, and Aluminum-Doped ZnO Using Poly(vinyl pyrrolidone)

(2014) Carolyn R. Ellinger et al.   CHEMISTRY OF MATERIALS

Tuning Optical Properties of Al2O3/ZnO Nanolaminates Synthesized by Atomic Layer Deposition

(2014) Adib Abou Chaaya et al.   Journal of Physical Chemistry C

Atomic layer deposition of ZnO: a review

(2014) Tommi Tynell et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Thin-Film Silicon Triple-Junction Solar Cells on Highly Transparent Front Electrodes With Stabilized Efficiencies up to 12.8%

(2014) Jan-Willem Schuttauf et al.   IEEE Journal of Photovoltaics

Improved Performance of Organic Light-Emitting Diodes Fabricated on Al-Doped ZnO Anodes Incorporating a Homogeneous Al-Doped ZnO Buffer Layer Grown by Atomic Layer Deposition

(2013) Yong-June Choi et al.   ACS Applied Materials & Interfaces

Spatial Atmospheric Atomic Layer Deposition of AlxZn1–xO

(2013) A. Illiberi et al.   ACS Applied Materials & Interfaces

Enhancement of the third-order optical nonlinearity in ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition

(2013) L. Karvonen et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition of Al-doped ZnO Films Using Aluminum Isopropoxide as the Al Precursor

(2013) Xu Qian et al.   CHEMICAL VAPOR DEPOSITION

Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD

(2013) Stephen E. Potts et al.   CHEMICAL VAPOR DEPOSITION

Enhanced Doping Efficiency of Al-Doped ZnO by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide as an Alternative Aluminum Precursor

(2013) Y. Wu et al.   CHEMISTRY OF MATERIALS

Energy-enhanced atomic layer deposition for more process and precursor versatility

(2013) S.E. Potts et al.   COORDINATION CHEMISTRY REVIEWS

‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

(2013) Anjana Devi   COORDINATION CHEMISTRY REVIEWS

Electrical transport and Al doping efficiency in nanoscale ZnO films prepared by atomic layer deposition

(2013) Y. Wu et al.   JOURNAL OF APPLIED PHYSICS

Properties of boron-doped ZnO thin films grown by using MOCVD

(2013) In-Hwan Choi   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Highly textured ZnO:B films grown by low pressure chemical vapor deposition for efficiency enhancement of heterojunction silicon-based solar cells

(2013) Jui-Chung Hsiao et al.   Journal of the Taiwan Institute of Chemical Engineers

Inverted polymer solar cells with a boron-doped zinc oxide layer deposited by metal organic chemical vapor deposition

(2013) Ziyang Hu et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

ALD grown bilayer junction of ZnO:Al and tunnel oxide barrier for SIS solar cell

(2013) O. Bethge et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition

(2013) Qiongqiong Hou et al.   Nanoscale Research Letters

ZnO:Al cathode for highly efficient, semitransparent 4% organic solar cells utilizing TiOx and aluminum interlayers

(2012) Andreas Bauer et al.   APPLIED PHYSICS LETTERS

A study of ZnO:B films for thin film silicon solar cells

(2012) J. Yin et al.   APPLIED SURFACE SCIENCE

Study of the aluminum doping of zinc oxide films prepared by atomic layer deposition at low temperature

(2012) Pascal Genevée et al.   APPLIED SURFACE SCIENCE

Non-stoichiometric AlOxFilms Prepared by Chemical Vapor Deposition Using Dimethylaluminum Isopropoxide as Single Precursor and Their Non-volatile Memory Characteristics

(2012) Sun-Sook Lee et al.   BULLETIN OF THE KOREAN CHEMICAL SOCIETY

Electron doping of ALD-grown ZnO thin films through Al and P substitutions

(2012) T. Tynell et al.   JOURNAL OF MATERIALS SCIENCE

Plasma-enhanced and thermal atomic layer deposition of Al2O3using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor

(2012) Stephen E. Potts et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition

(2012) Tara Dhakal et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of Al-doped ZnO thin films

(2012) Tommi Tynell et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Electrical conductivity and photoresistance of atomic layer deposited Al-doped ZnO films

(2012) Rajeh M. Mundle et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Effects of Rapid Thermal Annealing on Structural, Luminescent, and Electrical Properties of Al-Doped ZnO Films Grown by Atomic Layer Deposition

(2012) Yang Geng et al.   ECS Journal of Solid State Science and Technology

Effects of post-deposition rapid thermal annealing on aluminum-doped ZnO thin films grown by atomic layer deposition

(2011) Yung-Chen Cheng   APPLIED SURFACE SCIENCE

Structural, Transport and Optical Properties of Boron-doped Zinc Oxide Nanocrystalline

(2011) Vinod Kumar et al.   JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY

Studies on optical, structural and electrical properties of atomic layer deposited Al-doped ZnO thin films with various Al concentrations and deposition temperatures

(2011) W J Maeng et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films

(2011) Do-Joong Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Photovoltaic manufacturing: Present status, future prospects, and research needs

(2011) Colin A. Wolden et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of Al-doped ZnO films using ozone as the oxygen source: A comparison of two methods to deliver aluminum

(2011) Hai Yuan et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Zinc oxide for electronic, photovoltaic and optoelectronic applications

(2011) M. Godlewski et al.   LOW TEMPERATURE PHYSICS

Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

(2011) W.M.M. (Erwin) Kessels et al.   MRS BULLETIN

Nanoengineering and interfacial engineering of photovoltaics by atomic layer deposition

(2011) Jonathan R. Bakke et al.   Nanoscale

Performance comparison of dye-sensitized solar cells with different ZnO photoanodes

(2011) Ming Ke Wu et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Sol–gel derived hydrogen annealed ZnO:Al films for silicon solar cell application

(2011) Firoz Khan et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Effect of a compact ZnO interlayer on the performance of ZnO-based dye-sensitized solar cells

(2011) G. Pérez-Hernández et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Boron nitride coatings by chemical vapor deposition from borazine

(2011) Jun-Sheng Li et al.   SURFACE & COATINGS TECHNOLOGY

Structure and morphology of aluminium doped Zinc-oxide layers prepared by atomic layer deposition

(2011) Zs. Baji et al.   THIN SOLID FILMS

Textured surface ZnO:B/(hydrogenated gallium-doped ZnO) and (hydrogenated gallium-doped ZnO)/ZnO:B transparent conductive oxide layers for Si-based thin film solar cells

(2011) Cong-bo Yan et al.   THIN SOLID FILMS

Spectroscopic characterization of highly doped ZnO films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]

(2011) Andreas Frölich et al.   Optical Materials Express

Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

(2010) Do-Joong Lee et al.   ADVANCED FUNCTIONAL MATERIALS

Deposition of BN interphase coatings from B-trichloroborazine and its effects on the mechanical properties of SiC/SiC composites

(2010) Haitang Wu et al.   APPLIED SURFACE SCIENCE

Atomic Layer Deposition of Al-doped ZnO Films: Effect of Grain Orientation on Conductivity

(2010) Neil P. Dasgupta et al.   CHEMISTRY OF MATERIALS

Current status and opportunities in chalcopyrite solar cells

(2010) Angus A. Rockett   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

(2010) Parag Banerjee et al.   JOURNAL OF APPLIED PHYSICS

Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

(2010) S. E. Potts et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition

(2010) G. Luka et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Structure and Electro-Optical Properties of Thin Films Grown by Alternate Atomic Layer Deposition of ZnO and Al2O3 on the Sapphire Substrate

(2010) Miran \\v{C}eh et al.   MATERIALS TRANSACTIONS

Preparation of ZnO thin films using MOCVD technique with D2O/H2O gas mixture for use as TCO in silicon-based thin film solar cells

(2010) Aswin Hongsingthong et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Atomic layer deposited high-k nanolaminate capacitors

(2010) S.W. Smith et al.   SOLID-STATE ELECTRONICS

Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition

(2010) Cheol Hyoun Ahn et al.   THIN SOLID FILMS

Orientation of B–C–N hybrid films deposited on Ni (111) and polycrystalline Ti substrates explored by X-ray absorption spectroscopy

(2010) Md. Abdul Mannan et al.   THIN SOLID FILMS

Improved performance of poly(3-hexylthiophene)/zinc oxide hybrid photovoltaics modified with interfacial nanocrystalline cadmium sulfide

(2009) Erik D. Spoerke et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Role of Gas Doping Sequence in Surface Reactions and Dopant Incorporation during Atomic Layer Deposition of Al-Doped ZnO

(2009) Jeong-Seok Na et al.   CHEMISTRY OF MATERIALS

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Efficient charge collection with sol–gel derived colloidal ZnO thin film in photovoltaic devices

(2009) A. K. K. Kyaw et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

ZnO/Al2O3core–shell nanorod arrays: growth, structural characterization, and luminescent properties

(2009) C Y Chen et al.   NANOTECHNOLOGY

Fundamentals of zinc oxide as a semiconductor

(2009) Anderson Janotti et al.   REPORTS ON PROGRESS IN PHYSICS

Effects of intrinsic ZnO buffer layer based on P3HT/PCBM organic solar cells with Al-doped ZnO electrode

(2009) Sungeun Park et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Chemical and electronic interface structure of spray pyrolysis deposited undoped and Al-doped ZnO thin films on a commercial Cz-Si solar cell substrate

(2009) M. Gabás et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide

(2009) M. Godlewski et al.   THIN SOLID FILMS

Growth and characterization of stoichiometric BCN films on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition

(2009) Md. Abdul Mannan et al.   THIN SOLID FILMS

Atomic Layer Deposition of ZnO in Quantum Dot Thin Films

(2008) Alexandre Pourret et al.   ADVANCED MATERIALS

Atomic Layer Deposition of Undoped and Al-Doped ZnO Thin Films Usingthe Zn Alkoxide Precursor Methylzinc Isopropoxide

(2008) Ki-Seok An et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Electrical properties and carrier transport mechanisms of n-ZnO/SiOx/n-Si isotype heterojunctions with native or thermal oxide interlayers

(2008) Dengyuan Song et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Advances in a-Si:H/c-Si heterojunction solar cell fabrication and characterization

(2008) L. Korte et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide

(2007) Klaus Ellmer et al.   THIN SOLID FILMS