‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications

Published 2013 View Full Article

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Title
‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications
Authors
Keywords
-
Journal
COORDINATION CHEMISTRY REVIEWS
Volume 257, Issue 23-24, Pages 3332-3384
Publisher
Elsevier BV
Online
2013-08-28
DOI
10.1016/j.ccr.2013.07.025

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