Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

Remote Plasma ALD of Platinum and Platinum Oxide Films

(2009) H. C. M. Knoops et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Stability of Al2O3 and Al2O3/a-SiNx:H stacks for surface passivation of crystalline silicon

(2009) G. Dingemans et al.   JOURNAL OF APPLIED PHYSICS

In situspectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

(2009) E Langereis et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Low-Temperature Atomic Layer-Deposited TiO2Films with Low Photoactivity

(2009) Xinhua Liang et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Surface chemistry of plasma-assisted atomic layer deposition of Al2O3 studied by infrared spectroscopy

(2008) E. Langereis et al.   APPLIED PHYSICS LETTERS

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition of Platinum Oxide and Metallic Platinum Thin Films from Pt(acac)2and Ozone

(2008) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone

(2008) Jinhee Kwon et al.   CHEMISTRY OF MATERIALS

Extremely low temperature growth of ZnO by atomic layer deposition

(2008) E. Guziewicz et al.   JOURNAL OF APPLIED PHYSICS

Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3

(2008) S. B. S. Heil et al.   JOURNAL OF APPLIED PHYSICS

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

(2008) David N. Goldstein et al.   Journal of Physical Chemistry C

Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma

(2008) S. B. S. Heil et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Quantum confinement in amorphous TiO2films studied via atomic layer deposition

(2008) David M King et al.   NANOTECHNOLOGY

Enhanced OLED performance upon photolithographic patterning by using an atomic-layer-deposited buffer layer

(2008) Chih-Yu Chang et al.   ORGANIC ELECTRONICS

Al2O3buffer in a ZnO thin film transistor with poly-4-vinylphenol dielectric

(2008) Seokhwan Bang et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Low-temperature atomic layer deposition of ZnO films on particles in a fluidized bed reactor

(2008) David M. King et al.   THIN SOLID FILMS

Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition

(2007) C.X. Shan et al.   SURFACE & COATINGS TECHNOLOGY