Lack of correlation between C-V hysteresis and capacitance frequency dispersion in accumulation of metal gate/high-k/n-InGaAs metal-oxide-semiconductor stacks
出版年份 2018 全文链接
标题
Lack of correlation between C-V hysteresis and capacitance frequency dispersion in accumulation of metal gate/high-k/n-InGaAs metal-oxide-semiconductor stacks
作者
关键词
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出版物
JOURNAL OF APPLIED PHYSICS
Volume 124, Issue 22, Pages 224102
出版商
AIP Publishing
发表日期
2018-12-13
DOI
10.1063/1.5031025
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Bias temperature stress induced hydrogen depassivation from Al2O3/InGaAs interface defects
- (2018) Kechao Tang et al. JOURNAL OF APPLIED PHYSICS
- A New Quality Metric for III–V/High-k MOS Gate Stacks Based on the Frequency Dispersion of Accumulation Capacitance and the CET
- (2017) Abhitosh Vais et al. IEEE ELECTRON DEVICE LETTERS
- Comparative study of the breakdown transients of thin Al2O3 and HfO2 films in MIM structures and their connection with the thermal properties of materials
- (2017) S. Pazos et al. JOURNAL OF APPLIED PHYSICS
- On the distribution of oxide defect levels in Al2O3 and HfO2 high-k dielectrics deposited on InGaAs metal-oxide-semiconductor devices studied by capacitance-voltage hysteresis
- (2017) Abhitosh Vais et al. JOURNAL OF APPLIED PHYSICS
- Examining the relationship between capacitance-voltage hysteresis and accumulation frequency dispersion in InGaAs metal-oxide-semiconductor structures based on the response to post-metal annealing
- (2017) Jun Lin et al. MICROELECTRONIC ENGINEERING
- Temperature dependence of trapping effects in metal gates/Al 2 O 3 /InGaAs stacks
- (2017) F. Palumbo et al. SOLID-STATE ELECTRONICS
- Study of the interface stability of the metal (Mo, Ni, Pd)/HfO2/AlN/InGaAs MOS devices
- (2017) Huy Binh Do et al. AIP Advances
- Temperature Dependent Border Trap Response Produced by a Defective Interfacial Oxide Layer in Al2O3/InGaAs Gate Stacks
- (2016) Kechao Tang et al. ACS Applied Materials & Interfaces
- Systematic study of interfacial reactions induced by metal electrodes in high-k/InGaAs gate stacks
- (2016) S. Yoshida et al. APPLIED PHYSICS LETTERS
- Impact of starting measurement voltage relative to flat-band voltage position on the capacitance-voltage hysteresis and on the defect characterization of InGaAs/high-k metal-oxide-semiconductor stacks
- (2015) Abhitosh Vais et al. APPLIED PHYSICS LETTERS
- Temperature dependence of frequency dispersion in III–V metal-oxide-semiconductor C-V and the capture/emission process of border traps
- (2015) Abhitosh Vais et al. APPLIED PHYSICS LETTERS
- The dispersion in accumulation at InGaAs-based metal/oxide/semiconductor gate stacks with a bi-layered dielectric structure
- (2015) Igor Krylov et al. JOURNAL OF APPLIED PHYSICS
- The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces
- (2015) Tyler Kent et al. JOURNAL OF CHEMICAL PHYSICS
- High-K materials and metal gates for CMOS applications
- (2015) John Robertson et al. MATERIALS SCIENCE & ENGINEERING R-REPORTS
- Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
- (2015) Vladimir Djara et al. MICROELECTRONIC ENGINEERING
- On MOS admittance modeling to study border trap capture/emission and its effect on electrical behavior of high-k/III–V MOS devices
- (2015) Abhitosh Vais et al. MICROELECTRONIC ENGINEERING
- Accumulation capacitance frequency dispersion of III-V metal-insulator-semiconductor devices due to disorder induced gap states
- (2014) R. V. Galatage et al. JOURNAL OF APPLIED PHYSICS
- Degradation characteristics of metal/Al2O3/n-InGaAs capacitors
- (2014) F. Palumbo et al. JOURNAL OF APPLIED PHYSICS
- Determination of energy and spatial distribution of oxide border traps in In0.53Ga0.47As MOS capacitors from capacitance–voltage characteristics measured at various temperatures
- (2014) Chunmeng Dou et al. MICROELECTRONICS RELIABILITY
- Arsenic decapping and pre-atomic layer deposition trimethylaluminum passivation of Al2O3/InGaAs(100) interfaces
- (2013) Jaesoo Ahn et al. APPLIED PHYSICS LETTERS
- Border Traps in Ge/III–V Channel Devices: Analysis and Reliability Aspects
- (2013) Eddy Simoen et al. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
- Effect of oxygen species on the positive flat-band voltage shift in Al2O3/GaN metal–insulator–semiconductor capacitors with post-deposition annealing
- (2013) Hee-Sung Kang et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Frequency dispersion in III-V metal-oxide-semiconductor capacitors
- (2012) Susanne Stemmer et al. APPLIED PHYSICS LETTERS
- Impact of Forming Gas Annealing on the Performance of Surface-Channel $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ MOSFETs With an ALD $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric
- (2012) V. Djara et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- A Distributed Bulk-Oxide Trap Model for $\hbox{Al}_{2} \hbox{O}_{3}$ InGaAs MOS Devices
- (2012) Yu Yuan et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Reduction in interface state density of Al2O3/InGaAs metal-oxide-semiconductor interfaces by InGaAs surface nitridation
- (2012) Takuya Hoshii et al. JOURNAL OF APPLIED PHYSICS
- A Combined Interface and Border Trap Model for High-Mobility Substrate Metal–Oxide–Semiconductor Devices Applied to $\hbox{In}_{0.53} \hbox{Ga}_{0.47}\hbox{As}$ and InP Capacitors
- (2011) Guy Brammertz et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Native defects in Al2O3 and their impact on III-V/Al2O3 metal-oxide-semiconductor-based devices
- (2011) J. R. Weber et al. JOURNAL OF APPLIED PHYSICS
- An extension of the Curie-von Schweidler law for the leakage current decay in MIS structures including progressive breakdown
- (2011) E. Miranda et al. MICROELECTRONICS RELIABILITY
- Stochastic charge trapping in oxides: From random telegraph noise to bias temperature instabilities
- (2011) Tibor Grasser MICROELECTRONICS RELIABILITY
- Atomic Layer Deposition of Dielectrics on Ge and III–V Materials for Ultrahigh Performance Transistors
- (2011) Robert M. Wallace et al. MRS BULLETIN
- Nanometre-scale electronics with III–V compound semiconductors
- (2011) Jesús A. del Alamo NATURE
- Quantification of trap densities at dielectric/III–V semiconductor interfaces
- (2010) Roman Engel-Herbert et al. APPLIED PHYSICS LETTERS
- Border traps in Al2O3/In0.53Ga0.47As (100) gate stacks and their passivation by hydrogen anneals
- (2010) Eun Ji Kim et al. APPLIED PHYSICS LETTERS
- Arsenic decapping and half cycle reactions during atomic layer deposition of Al2O3 on In0.53Ga0.47As(001)
- (2010) Byungha Shin et al. APPLIED PHYSICS LETTERS
- Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces
- (2010) Roman Engel-Herbert et al. JOURNAL OF APPLIED PHYSICS
- Model of interface states at III-V oxide interfaces
- (2009) John Robertson APPLIED PHYSICS LETTERS
- Atomically abrupt and unpinned Al2O3/In0.53Ga0.47As interfaces: Experiment and simulation
- (2009) Eun Ji Kim et al. JOURNAL OF APPLIED PHYSICS
- Inversion-Mode Self-Aligned $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ N-Channel Metal-Oxide-Semiconductor Field-Effect Transistor With HfAlO Gate Dielectric and TaN Metal Gate
- (2008) J. Q. Lin et al. IEEE ELECTRON DEVICE LETTERS
- On the Correct Extraction of Interface Trap Density of MOS Devices With High-Mobility Semiconductor Substrates
- (2008) Koen Martens et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
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