Lack of correlation between C-V hysteresis and capacitance frequency dispersion in accumulation of metal gate/high-k/n-InGaAs metal-oxide-semiconductor stacks

标题
Lack of correlation between C-V hysteresis and capacitance frequency dispersion in accumulation of metal gate/high-k/n-InGaAs metal-oxide-semiconductor stacks
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 124, Issue 22, Pages 224102
出版商
AIP Publishing
发表日期
2018-12-13
DOI
10.1063/1.5031025

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