Atomic Layer Deposition of Dielectrics on Ge and III–V Materials for Ultrahigh Performance Transistors
出版年份 2011 全文链接
标题
Atomic Layer Deposition of Dielectrics on Ge and III–V Materials for Ultrahigh Performance Transistors
作者
关键词
-
出版物
MRS BULLETIN
Volume 34, Issue 07, Pages 493-503
出版商
Cambridge University Press (CUP)
发表日期
2011-02-02
DOI
10.1557/mrs2009.137
参考文献
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