Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications
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Title
Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications
Authors
Keywords
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Journal
Materials
Volume 14, Issue 19, Pages 5658
Publisher
MDPI AG
Online
2021-09-29
DOI
10.3390/ma14195658
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