Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)

Title
Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina (Al2O3)
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 25, Pages 253107
Publisher
AIP Publishing
Online
2014-06-26
DOI
10.1063/1.4885415

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