Thermal Properties of Ultrathin Hafnium Oxide Gate Dielectric Films

Title
Thermal Properties of Ultrathin Hafnium Oxide Gate Dielectric Films
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 30, Issue 12, Pages 1269-1271
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-11-04
DOI
10.1109/led.2009.2032937

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