Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

Expanding the dimensions of metal–organic framework research towards dielectrics

(2018) Shruti Mendiratta et al.   COORDINATION CHEMISTRY REVIEWS

On-Chip Interconnect Conductor Materials for End-of-Roadmap Technology Nodes

(2018) Anshul A. Vyas et al.   IEEE TRANSACTIONS ON NANOTECHNOLOGY

Dielectric Properties of Zeolitic Imidazolate Frameworks in the Broad-Band Infrared Regime

(2018) Matthew R. Ryder et al.   Journal of Physical Chemistry Letters

Atomic Layer Etching: Rethinking the Art of Etch

(2018) Keren J. Kanarik et al.   Journal of Physical Chemistry Letters

Rapid Fabrication of Metal–Organic Framework Films from Metal Substrates Using Intense Pulsed Light

(2018) Changyong Yim et al.   CRYSTAL GROWTH & DESIGN

Quasi-metallic behavior of ZnO grown by atomic layer deposition: The role of hydrogen

(2017) Holger Beh et al.   JOURNAL OF APPLIED PHYSICS

Thickness dependence of the resistivity of platinum-group metal thin films

(2017) Shibesh Dutta et al.   JOURNAL OF APPLIED PHYSICS

Computational Study of ZIF-8 and ZIF-67 Performance for Separation of Gas Mixtures

(2017) Panagiotis Krokidas et al.   Journal of Physical Chemistry C

Probing Dielectric Properties of Metal–Organic Frameworks: MIL-53(Al) as a Model System for Theoretical Predictions and Experimental Measurements via Synchrotron Far- and Mid-Infrared Spectroscopy

(2017) Kirill Titov et al.   Journal of Physical Chemistry Letters

Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition

(2017) Holger Beh et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Theoretical prediction of the mechanical properties of zeolitic imidazolate frameworks (ZIFs)

(2017) Bin Zheng et al.   RSC Advances

Transmission electron microscopy on metal–organic frameworks – a review

(2017) Christian Wiktor et al.   Journal of Materials Chemistry A

On the mechanical and electrical properties of self-assembly-based organosilicate porous films

(2017) M. Redzheb et al.   Journal of Materials Chemistry C

Vapor-Phase Deposition and Modification of Metal-Organic Frameworks: State-of-the-Art and Future Directions

(2016) Ivo Stassen et al.   CHEMISTRY-A EUROPEAN JOURNAL

Impact of Wire Geometry on Interconnect RC and Circuit Delay

(2016) Ivan Ciofi et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

ZIF-67 Framework: A Promising New Candidate for Propylene/Propane Separation. Experimental Data and Molecular Simulations

(2016) Panagiotis Krokidas et al.   Journal of Physical Chemistry C

All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition

(2016) Kristian Blindheim Lausund et al.   Nature Communications

Conquering the Low-kDeath Curve: Insulating Boron Carbide Dielectrics with Superior Mechanical Properties

(2016) Bradley J. Nordell et al.   Advanced Electronic Materials

Damage free integration of ultralow-k dielectrics by template replacement approach

(2015) L. Zhang et al.   APPLIED PHYSICS LETTERS

Adsorption and desorption characteristics of alcohol vapors on a nanoporous ZIF-8 film investigated using silicon microcantilevers

(2015) Changyong Yim et al.   CHEMICAL COMMUNICATIONS

Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

(2015) J.-F. de Marneffe et al.   JOURNAL OF APPLIED PHYSICS

Porosity scaling strategies for low-k films

(2015) David J. Michalak et al.   JOURNAL OF MATERIALS RESEARCH

Observing the Growth of Metal–Organic Frameworks by in Situ Liquid Cell Transmission Electron Microscopy

(2015) Joseph P. Patterson et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

(2015) Matthieu Lépinay et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Chemical vapour deposition of zeolitic imidazolate framework thin films

(2015) Ivo Stassen et al.   NATURE MATERIALS

The low dielectric constant and relaxation dielectric behavior in hydrogen-bonding metal–organic frameworks

(2015) Shan-Shan Yu et al.   RSC Advances

Metal-Organic Frameworks: New Interlayer Dielectric Materials

(2015) Muhammad Usman et al.   ChemElectroChem

Anion-Controlled Dielectric Behavior of Homochiral Tryptophan-Based Metal–Organic Frameworks

(2014) Shruti Mendiratta et al.   CRYSTAL GROWTH & DESIGN

Dielectric Properties of Selected Metal–Organic Frameworks

(2014) Robert Warmbier et al.   Journal of Physical Chemistry C

Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-k Dielectrics by Self-Assembled Monolayers

(2014) Yiting Sun et al.   LANGMUIR

Narrow gap filling in 25nm shallow trench isolation using highly porous organosilica

(2014) Hyuntaek Oh et al.   THIN SOLID FILMS

Exploring Alternative Metals to Cu and W for Interconnects Applications Using Automated First-Principles Simulations

(2014) K. Sankaran et al.   ECS Journal of Solid State Science and Technology

Advanced Interconnects: Materials, Processing, and Reliability

(2014) Mikhail R. Baklanov et al.   ECS Journal of Solid State Science and Technology

Computational exploration of newly synthesized zirconium metal–organic frameworks UiO-66, -67, -68 and analogues

(2014) Li-Ming Yang et al.   Journal of Materials Chemistry C

Predicting low-k zeolite materials

(2014) Roberta Poloni et al.   Journal of Materials Chemistry C

Intrinsic low dielectric behaviour of a highly thermally stable Sr-based metal–organic framework for interlayer dielectric materials

(2014) Muhammad Usman et al.   Journal of Materials Chemistry C

On the dielectric and optical properties of surface-anchored metal-organic frameworks: A study on epitaxially grown thin films

(2013) Engelbert Redel et al.   APPLIED PHYSICS LETTERS

Alcohol and water adsorption in zeolitic imidazolate frameworks

(2013) Ke Zhang et al.   CHEMICAL COMMUNICATIONS

Plasma processing of low-k dielectrics

(2013) Mikhail R. Baklanov et al.   JOURNAL OF APPLIED PHYSICS

Exceptional Mechanical Stability of Highly Porous Zirconium Metal–Organic Framework UiO-66 and Its Important Implications

(2013) Hui Wu et al.   Journal of Physical Chemistry Letters

What makes zeolitic imidazolate frameworks hydrophobic or hydrophilic? The impact of geometry and functionalization on water adsorption

(2013) Aurélie U. Ortiz et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Terminology of metal–organic frameworks and coordination polymers (IUPAC Recommendations 2013)

(2013) Stuart R. Batten et al.   PURE AND APPLIED CHEMISTRY

Mechanical properties of metal-organic frameworks: An indentation study on epitaxial thin films

(2012) S. Bundschuh et al.   APPLIED PHYSICS LETTERS

Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics

(2012) Salvador Eslava et al.   CHEMISTRY OF MATERIALS

Improved Methodology for Integrated $k$ -Value Extractions

(2012) Ivan Ciofi et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

The fringe capacitance formula of microstructures

(2012) Wan-Chun Chuang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Mechanical properties of high porosity low-kdielectric nano-films determined by Brillouin light scattering

(2012) S Bailey et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Exceptionally Low Shear Modulus in a Prototypical Imidazole-Based Metal-Organic Framework

(2012) Jin-Chong Tan et al.   PHYSICAL REVIEW LETTERS

Elastic properties of porous low-k dielectric nano-films

(2011) W. Zhou et al.   JOURNAL OF APPLIED PHYSICS

Gwyddion: an open-source software for SPM data analysis

(2011) David Nečas et al.   Open Physics

Low-Temperature Etching of Cu by Hydrogen-Based Plasmas

(2010) Fangyu Wu et al.   ACS Applied Materials & Interfaces

Stiffening of organosilicate glasses by organic cross-linking

(2010) Han Li et al.   ACTA MATERIALIA

Metal-organic frameworks as promising candidates for future ultralow-k dielectrics

(2010) K. Zagorodniy et al.   APPLIED PHYSICS LETTERS

Growth and Characterization of Conducting ZnO Thin Films by Atomic Layer Deposition

(2010) Yo-Sep Min et al.   BULLETIN OF THE KOREAN CHEMICAL SOCIETY

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Capacitance measurements and k-value extractions of low-k films

(2010) Ivan Ciofi et al.   MICROELECTRONIC ENGINEERING

Chemical structure, network topology, and porosity effects on the mechanical properties of Zeolitic Imidazolate Frameworks

(2010) J. C. Tan et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH films

(2010) C. Licitra et al.   THIN SOLID FILMS

Size-Dependent Resistivity in Nanoscale Interconnects

(2009) Daniel Josell et al.   Annual Review of Materials Research

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

(2009) Han Li et al.   JOURNAL OF MATERIALS RESEARCH

Pressure-Induced Amorphization and Porosity Modification in a Metal−Organic Framework

(2009) Karena W. Chapman et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions

(2008) Salvador Eslava et al.   ADVANCED MATERIALS

Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions

(2008) Salvador Eslava et al.   MICROPOROUS AND MESOPOROUS MATERIALS