Quasi-metallic behavior of ZnO grown by atomic layer deposition: The role of hydrogen

Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition

(2017) Holger Beh et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Resistivity of atomic layer deposition grown ZnO: The influence of deposition temperature and post-annealing

(2016) J. Laube et al.   THIN SOLID FILMS

ZnO by ALD - Advantages of the Material Grown at Low Temperature

(2016) E. Guziewicz et al.   ACTA PHYSICA POLONICA A

ALD grown zinc oxide with controllable electrical properties

(2012) E Guziewicz et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Analysis of surface, subsurface, and bulk hydrogen in ZnO using nuclear reaction analysis

(2011) F. Traeger et al.   PHYSICAL REVIEW B

Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

(2011) Jari Malm et al.   THIN SOLID FILMS

Growth and Characterization of Conducting ZnO Thin Films by Atomic Layer Deposition

(2010) Yo-Sep Min et al.   BULLETIN OF THE KOREAN CHEMICAL SOCIETY

'... a metal conducts and a non-metal doesn't'

(2010) P. P. Edwards et al.   PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES

Effect of hydrogen doping in ZnO thin films by pulsed DC magnetron sputtering

(2009) Young Ran Park et al.   APPLIED SURFACE SCIENCE

Identification of two hydrogen donors in ZnO

(2009) E. V. Lavrov et al.   PHYSICAL REVIEW B

ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

(2007) S.J. Lim et al.   THIN SOLID FILMS