Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
出版年份 2019 全文链接
标题
Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
作者
关键词
-
出版物
Nature Communications
Volume 10, Issue 1, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2019-08-19
DOI
10.1038/s41467-019-11703-x
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