On-Chip Interconnect Conductor Materials for End-of-Roadmap Technology Nodes

Title
On-Chip Interconnect Conductor Materials for End-of-Roadmap Technology Nodes
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 17, Issue 1, Pages 4-10
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2016-12-03
DOI
10.1109/tnano.2016.2635583

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