Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
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Title
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 118, Issue 13, Pages 133302
Publisher
AIP Publishing
Online
2015-10-03
DOI
10.1063/1.4932202
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