Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions

Title
Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 20, Issue 16, Pages 3110-3116
Publisher
Wiley
Online
2008-06-16
DOI
10.1002/adma.200701798

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