Porosity scaling strategies for low-k films

Microstructural characteristics and elastic modulus of porous solids

(2015) Zhangwei Chen et al.   ACTA MATERIALIA

Block Copolymer Packing Limits and Interfacial Reconfigurability in the Assembly of Periodic Mesoporous Organosilicas

(2015) Andrew W. Wills et al.   ADVANCED FUNCTIONAL MATERIALS

Surface-mounted metal-organic frameworks for applications in sensing and separation

(2015) Lars Heinke et al.   MICROPOROUS AND MESOPOROUS MATERIALS

Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning

(2015) Gheorghe Stan et al.   NANO LETTERS

Photochemical Growth of Highly Densely Packed Gold Nanoparticle Films for Biomedical Diagnostics

(2015) Gugu Rutherford et al.   ECS Journal of Solid State Science and Technology

Monolithic, Crystalline MOF Coating: An Excellent Patterning and Photoresist Material

(2015) Zhengbang Wang et al.   ChemNanoMat

The effect of water uptake on the mechanical properties of low-k organosilicate glass

(2013) X. Guo et al.   JOURNAL OF APPLIED PHYSICS

Plasma processing of low-k dielectrics

(2013) Mikhail R. Baklanov et al.   JOURNAL OF APPLIED PHYSICS

Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus

(2013) Kris Vanstreels et al.   LANGMUIR

Low Damage Cryogenic Etching of Porous Organosilicate Low-k Materials Using SF6/O2/SiF4

(2013) Liping Zhang et al.   ECS Journal of Solid State Science and Technology

Post Porosity Plasma Protection: Scaling of Efficiency with Porosity

(2012) Theo Frot et al.   ADVANCED FUNCTIONAL MATERIALS

Engineering ZIF-8 Thin Films for Hybrid MOF-Based Devices

(2012) Guang Lu et al.   ADVANCED MATERIALS

Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics

(2012) K. Vanstreels et al.   APPLIED PHYSICS LETTERS

Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics

(2012) Salvador Eslava et al.   CHEMISTRY OF MATERIALS

Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance

(2012) Frederik Goethals et al.   JOURNAL OF MATERIALS CHEMISTRY

Assembling Photoluminescent Silicon Nanocrystals into Periodic Mesoporous Organosilica

(2012) Min Guan et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Epitaxially grown metal-organic frameworks

(2012) Hartmut Gliemann et al.   Materials Today

Water Repellent Periodic Mesoporous Organosilicas

(2011) Wendong Wang et al.   ACS Nano

Application of the Protection/Deprotection Strategy to the Science of Porous Materials

(2011) Theo Frot et al.   ADVANCED MATERIALS

Metal–Organic Framework Thin Films: From Fundamentals to Applications.

(2011) Angélique Bétard et al.   CHEMICAL REVIEWS

Elastic properties of porous low-k dielectric nano-films

(2011) W. Zhou et al.   JOURNAL OF APPLIED PHYSICS

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

(2011) S.W. King et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Low-kPeriodic Mesoporous Organosilica with Air Walls: POSS-PMO

(2011) Makoto Seino et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0

(2011) Willi Volksen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance

(2011) Premysl Marsik et al.   THIN SOLID FILMS

Ultralow Dielectric Constant Tetravinyltetramethylcyclotetrasiloxane Films Deposited by Initiated Chemical Vapor Deposition (iCVD)

(2010) Nathan J. Trujillo et al.   ADVANCED FUNCTIONAL MATERIALS

Functional Materials: From Hard to Soft Porous Frameworks

(2010) Arne Thomas   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics

(2010) Sung-Kyu Min et al.   CURRENT APPLIED PHYSICS

Crosslinking of porous SiOCH films involving Si–O–C bonds: Impact of deposition and curing

(2010) O. Gourhant et al.   JOURNAL OF APPLIED PHYSICS

Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

(2010) A. M. Urbanowicz et al.   JOURNAL OF APPLIED PHYSICS

Adsorption properties in high optical quality nanoZIF-8 thin films with tunable thickness

(2010) Aude Demessence et al.   JOURNAL OF MATERIALS CHEMISTRY

Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials

(2010) E. Kunnen et al.   MICROELECTRONIC ENGINEERING

Effect of porogen residue on electrical characteristics of ultra low-k materials

(2010) Mikhail R. Baklanov et al.   MICROELECTRONIC ENGINEERING

Chemical structure, network topology, and porosity effects on the mechanical properties of Zeolitic Imidazolate Frameworks

(2010) J. C. Tan et al.   PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA

Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH films

(2010) C. Licitra et al.   THIN SOLID FILMS

Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

(2010) Premysl Marsik et al.   THIN SOLID FILMS

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials

(2009) Adam M. Urbanowicz et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion

(2009) M. A. Goldman et al.   JOURNAL OF APPLIED PHYSICS

The effect of porogen loading on the stiffness and fracture energy of brittle organosilicates

(2009) Han Li et al.   JOURNAL OF MATERIALS RESEARCH

Adjusting the Skeleton and Pore Structure of Porous SiCOH Dielectrics

(2009) S. M. Gates et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

32nm node BEOL integration with an extreme low-k porous SiOCH dielectric k=2.3

(2009) K. Hamioud et al.   MICROELECTRONIC ENGINEERING

Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics

(2009) V. Jousseaume et al.   THIN SOLID FILMS

Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage

(2008) E. Todd Ryan et al.   JOURNAL OF APPLIED PHYSICS

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films

(2008) Geraud Dubois et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Tortuosity-porosity relation in porous media flow

(2008) Maciej Matyka et al.   PHYSICAL REVIEW E

Silica aerogel; synthesis, properties and characterization

(2007) A. Soleimani Dorcheh et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY