Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

Title
Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 24, Issue 03, Pages 1114-1126
Publisher
Cambridge University Press (CUP)
Online
2009-02-25
DOI
10.1557/jmr.2009.0144

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