Atomic Layer Etching: Rethinking the Art of Etch

Published 2018 View Full Article

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Title
Atomic Layer Etching: Rethinking the Art of Etch
Authors
Keywords
-
Journal
Journal of Physical Chemistry Letters
Volume 9, Issue 16, Pages 4814-4821
Publisher
American Chemical Society (ACS)
Online
2018-08-11
DOI
10.1021/acs.jpclett.8b00997

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