Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition

Title
Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 35, Issue 1, Pages 01B127
Publisher
American Vacuum Society
Online
2016-12-20
DOI
10.1116/1.4972466

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