Low-Temperature Etching of Cu by Hydrogen-Based Plasmas

Published 2010 View Full Article

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Title
Low-Temperature Etching of Cu by Hydrogen-Based Plasmas
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 2, Issue 8, Pages 2175-2179
Publisher
American Chemical Society (ACS)
Online
2010-07-16
DOI
10.1021/am1003206

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