Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data

Published 2015 View Full Article

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Title
Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data
Authors
Keywords
Low-k materials, Porous organosilica, Ellipsometric porosimetry, Molecular simulation
Journal
MICROPOROUS AND MESOPOROUS MATERIALS
Volume 217, Issue -, Pages 119-124
Publisher
Elsevier BV
Online
2015-06-15
DOI
10.1016/j.micromeso.2015.05.050

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