Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-k Dielectrics by Self-Assembled Monolayers

Published 2014 View Full Article

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Title
Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-k Dielectrics by Self-Assembled Monolayers
Authors
Keywords
-
Journal
LANGMUIR
Volume 30, Issue 13, Pages 3832-3844
Publisher
American Chemical Society (ACS)
Online
2014-03-13
DOI
10.1021/la404165n

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