Narrow gap filling in 25nm shallow trench isolation using highly porous organosilica

Published 2014 View Full Article

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Title
Narrow gap filling in 25nm shallow trench isolation using highly porous organosilica
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 562, Issue -, Pages 166-171
Publisher
Elsevier BV
Online
2014-04-18
DOI
10.1016/j.tsf.2014.04.046

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