Al2O3/InGaAs Metal-Oxide-Semiconductor Interface Properties: Impact of Gd2O3and Sc2O3Interfacial Layers by Atomic Layer Deposition
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Title
Al2O3/InGaAs Metal-Oxide-Semiconductor Interface Properties: Impact of Gd2O3and Sc2O3Interfacial Layers by Atomic Layer Deposition
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 3, Issue 11, Pages N133-N141
Publisher
The Electrochemical Society
Online
2014-08-28
DOI
10.1149/2.0021411jss
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