GaAs interfacial self-cleaning by atomic layer deposition

Published 2008 View Full Article

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Title
GaAs interfacial self-cleaning by atomic layer deposition
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 7, Pages 071901
Publisher
AIP Publishing
Online
2008-02-20
DOI
10.1063/1.2883956

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