Challenges of integration of high-κ dielectric with III–V materials (Invited Paper)

Published 2009 View Full Article

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Title
Challenges of integration of high-κ dielectric with III–V materials (Invited Paper)
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1540-1543
Publisher
Elsevier BV
Online
2009-03-26
DOI
10.1016/j.mee.2009.03.117

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