A comprehensive study on the structural evolution of HfO2 thin films doped with various dopants

Title
A comprehensive study on the structural evolution of HfO2 thin films doped with various dopants
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 5, Issue 19, Pages 4677-4690
Publisher
Royal Society of Chemistry (RSC)
Online
2017-04-19
DOI
10.1039/c7tc01200d

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