Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes

Title
Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
Authors
Keywords
-
Journal
Physica Status Solidi-Rapid Research Letters
Volume 8, Issue 6, Pages 532-535
Publisher
Wiley
Online
2014-02-17
DOI
10.1002/pssr.201409017

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