Atomic Layer Deposition of Gd-Doped HfO[sub 2] Thin Films

A first-principles study of enhanced dielectric responses in Ti and Ce doped HfO2

(2009) Gargi Dutta   APPLIED PHYSICS LETTERS

Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy

(2009) A. Hardy et al.   APPLIED SURFACE SCIENCE

Structural phase transformation of Y2O3 doped HfO2 films grown on Si using atomic layer deposition

(2009) Prodyut Majumder et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of High-Permittivity Yttrium-Doped HfO[sub 2] Films

(2008) Jaakko Niinistö et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Effects of Y doping on the structural stability and defect properties of cubic HfO[sub 2]

(2008) G. H. Chen et al.   JOURNAL OF APPLIED PHYSICS

Silicate formation and thermal stability of ternary rare earth oxides as high-k dielectrics

(2008) S. Van Elshocht et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

First-principles study on doping and phase stability ofHfO2

(2008) Choong-Ki Lee et al.   PHYSICAL REVIEW B