Study of the Surface Reactions in ALD Hafnium Aluminates

Title
Study of the Surface Reactions in ALD Hafnium Aluminates
Authors
Keywords
-
Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 157, Issue 1, Pages G7
Publisher
The Electrochemical Society
Online
2009-12-04
DOI
10.1149/1.3246802

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