Chemical Solution Deposition of Ferroelectric Hafnium Oxide for Future Lead Free Ferroelectric Devices

Published 2015 View Full Article

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Title
Chemical Solution Deposition of Ferroelectric Hafnium Oxide for Future Lead Free Ferroelectric Devices
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 4, Issue 12, Pages P419-P423
Publisher
The Electrochemical Society
Online
2015-09-17
DOI
10.1149/2.0061512jss

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