Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films

Title
Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 8, Issue 24, Pages 15466-15475
Publisher
American Chemical Society (ACS)
Online
2016-05-30
DOI
10.1021/acsami.6b03586

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