A comprehensive study on the structural evolution of HfO2 thin films doped with various dopants
出版年份 2017 全文链接
标题
A comprehensive study on the structural evolution of HfO2 thin films doped with various dopants
作者
关键词
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出版物
Journal of Materials Chemistry C
Volume 5, Issue 19, Pages 4677-4690
出版商
Royal Society of Chemistry (RSC)
发表日期
2017-04-19
DOI
10.1039/c7tc01200d
参考文献
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