Characteristics of ALD‐ZnO Thin Film Transistor Using H 2 O and H 2 O 2 as Oxygen Sources

Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors

(2021) S. Kinnunen et al.   APPLIED SURFACE SCIENCE

Atomic Layer Deposition of 2D Metal Dichalcogenides for Electronics, Catalysis, Energy Storage, and Beyond

(2021) Miika Mattinen et al.   Advanced Materials Interfaces

Schottky contacts to ZnO layers grown by Atomic Layer Deposition: effects of H2O2 functionalization and transport mechanisms

(2021) R. Schifano et al.   APPLIED SURFACE SCIENCE

Flexible Al-Ti-Zn-O MIM Capacitors Fabricated by Room Temperature Atomic Layer Deposition and Their Electrical Performances

(2021) Jin Lei et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Performance Optimization of Atomic Layer Deposited ZnO Thin-Film Transistors by Vacuum Annealing

(2021) Mengfei Wang et al.   IEEE ELECTRON DEVICE LETTERS

Current State‐of‐the‐Art in the Interface/Surface Modification of Thermoelectric Materials

(2021) Shiyang He et al.   Advanced Energy Materials

Suppressed oxygen vacancy in pristine/N doped ZnO and improved ZnO homogenous p-n junction performance by H2O2 oxidant

(2021) Yue Wang et al.   APPLIED SURFACE SCIENCE

High‐Efficiency Nonfullerene Organic Solar Cells Enabled by Atomic Layer Deposited Zirconium‐Doped Zinc Oxide

(2020) Geedhika K. Poduval et al.   Solar RRL

Atomic Layer Deposition-Derived Nanomaterials: Oxides, Transition Metal Dichalcogenides, and Metal–Organic Frameworks

(2020) Zhiwei Zhang et al.   CHEMISTRY OF MATERIALS

Effect of Two-Step Annealing on High Stability of a-IGZO Thin-Film Transistor

(2020) Cong Peng et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

ALD growth of ZnO on p-Si and electrical characterization of ZnO/p-Si heterojunctions

(2020) Hogyoung Kim et al.   Materials Today Communications

Atomic layer deposition of ZnO on SnO2 nanospheres for enhanced formaldehyde detection

(2020) Chengming Lou et al.   SENSORS AND ACTUATORS B-CHEMICAL

Comparative study of the electrical characteristics of ALD ‐ZnO thin films using H 2 O and H 2 O 2 as the oxidants

(2019) Woo‐Jae Lee et al.   JOURNAL OF THE AMERICAN CERAMIC SOCIETY

Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition

(2019) Jun Yang et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

High-Performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition

(2019) Huijin Li et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric

(2019) Jun Yang et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Recent Progress in Photonic Processing of Metal‐Oxide Transistors

(2019) Emre Yarali et al.   ADVANCED FUNCTIONAL MATERIALS

ZnO bilayer thin film transistors using H2O and O3 as oxidants by atomic layer deposition

(2019) Xue Chen et al.   ACTA MATERIALIA

Molecular oxidation of surface –CH 3 during atomic layer deposition of Al 2 O 3 with H 2 O, H 2 O 2 , and O 3 : A theoretical study

(2018) Seunggi Seo et al.   APPLIED SURFACE SCIENCE

High-k Gate Dielectrics for Emerging Flexible and Stretchable Electronics

(2018) Binghao Wang et al.   CHEMICAL REVIEWS

Effect of High Oxygen Partial Pressure on Carrier Transport Mechanism in a-InGaZnO TFTs

(2018) Mai Phi Hung et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

ZnO based transparent thin film transistor grown by aerosol assisted CVD

(2018) Vipin K. Kaushik et al.   JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

2D Transition Metal Dichalcogenide Thin Films Obtained by Chemical Gas Phase Deposition Techniques

(2018) Gyu-Hyeon Park et al.   Advanced Materials Interfaces

CO Gas Sensor Based on E-Beam Evaporated ZnO, MgZnO, and CdZnO Thin Films: A Comparative Study

(2018) Deepak Punetha et al.   IEEE SENSORS JOURNAL

Effects of yttrium doping on the electrical performances and stability of ZnO thin-film transistors

(2018) Ablat Abliz et al.   APPLIED SURFACE SCIENCE

Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma

(2017) Akhil Sharma et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Roll-to-roll micro-gravure printed large-area zinc oxide thin film as the electron transport layer for solution-processed polymer solar cells

(2017) Chujun Zhang et al.   ORGANIC ELECTRONICS

Atomic layer deposition of Al2O3 on MoS2, WS2, WSe2, and h-BN: surface coverage and adsorption energy

(2017) Taejin Park et al.   RSC Advances

Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications

(2017) Alain E. Kaloyeros et al.   ECS Journal of Solid State Science and Technology

Zinc Oxide Thin Films for Memristive Devices: A Review

(2016) Marco Laurenti et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants

(2015) J. Park et al.   CERAMICS INTERNATIONAL

Time-of-flight – Energy spectrometer for elemental depth profiling – Jyväskylä design

(2014) Mikko Laitinen et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Identification of the native defect doping mechanism in amorphous indium zinc oxide thin films studied using ultra high pressure oxidation

(2013) Sunghwan Lee et al.   APPLIED PHYSICS LETTERS

The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method

(2012) N.Y. Yuan et al.   JOURNAL OF CRYSTAL GROWTH

Pulsed-radio frequency plasma enhanced chemical vapour deposition of low temperature silicon nitride for thin film transistors

(2012) Arman Ahnood et al.   THIN SOLID FILMS

Bias stress stable aqueous solution derived Y-doped ZnO thin film transistors

(2011) Taehwan Jun et al.   JOURNAL OF MATERIALS CHEMISTRY

Energetics of intrinsic defects and their complexes in ZnO investigated by density functional calculations

(2011) R. Vidya et al.   PHYSICAL REVIEW B

Blue Luminescence of ZnO Nanoparticles Based on Non-Equilibrium Processes: Defect Origins and Emission Controls

(2010) Haibo Zeng et al.   ADVANCED FUNCTIONAL MATERIALS

Growth and Characterization of Conducting ZnO Thin Films by Atomic Layer Deposition

(2010) Yo-Sep Min et al.   BULLETIN OF THE KOREAN CHEMICAL SOCIETY

Relationship between the photoluminescence and conductivity of undoped ZnO thin films grown with various oxygen pressures

(2009) Chang-Feng Yu et al.   APPLIED SURFACE SCIENCE

Band gap engineering of ZnO thin films by In2O3 incorporation

(2008) R.K. Gupta et al.   JOURNAL OF CRYSTAL GROWTH