Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition

Title
Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 66, Issue 4, Pages 1760-1765
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2019-02-15
DOI
10.1109/ted.2019.2896313

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