Effect of Two-Step Annealing on High Stability of a-IGZO Thin-Film Transistor

Published 2020 View Full Article

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Title
Effect of Two-Step Annealing on High Stability of a-IGZO Thin-Film Transistor
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 10, Pages 4262-4268
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-09-01
DOI
10.1109/ted.2020.3017718

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