Characteristics of ALD‐ZnO Thin Film Transistor Using H 2 O and H 2 O 2 as Oxygen Sources
出版年份 2022 全文链接
标题
Characteristics of ALD‐ZnO Thin Film Transistor Using H
2
O and H
2
O
2
as Oxygen Sources
作者
关键词
-
出版物
Advanced Materials Interfaces
Volume 9, Issue 15, Pages 2101953
出版商
Wiley
发表日期
2022-04-11
DOI
10.1002/admi.202101953
参考文献
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