Performance Optimization of Atomic Layer Deposited ZnO Thin-Film Transistors by Vacuum Annealing

Published 2021 View Full Article

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Title
Performance Optimization of Atomic Layer Deposited ZnO Thin-Film Transistors by Vacuum Annealing
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 5, Pages 716-719
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-03-27
DOI
10.1109/led.2021.3068992

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