Schottky contacts to ZnO layers grown by Atomic Layer Deposition: effects of H2O2 functionalization and transport mechanisms
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Title
Schottky contacts to ZnO layers grown by Atomic Layer Deposition: effects of H2O2 functionalization and transport mechanisms
Authors
Keywords
Schottky contacts, ALD-ZnO, Electrical transport mechanisms, Surface functionalization
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 149067
Publisher
Elsevier BV
Online
2021-03-06
DOI
10.1016/j.apsusc.2021.149067
References
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Related references
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- (2009) R. Schifano et al. APPLIED PHYSICS LETTERS
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- (2008) M. W. Allen et al. APPLIED PHYSICS LETTERS
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- Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide
- (2007) Klaus Ellmer et al. THIN SOLID FILMS
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