Schottky contacts to ZnO layers grown by Atomic Layer Deposition: effects of H2O2 functionalization and transport mechanisms

Title
Schottky contacts to ZnO layers grown by Atomic Layer Deposition: effects of H2O2 functionalization and transport mechanisms
Authors
Keywords
Schottky contacts, ALD-ZnO, Electrical transport mechanisms, Surface functionalization
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 149067
Publisher
Elsevier BV
Online
2021-03-06
DOI
10.1016/j.apsusc.2021.149067

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